11![](https://www.pdfsearch.io/img/f82793b7a55a799c81210bf0ca3f9cfd.jpg) | Add to Reading ListSource URL: www.wiley-vch.deLanguage: English - Date: 2013-04-03 21:06:05
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12![SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory](https://www.pdfsearch.io/img/b80b221fd892f72754d8c7652ce7164b.jpg) | Add to Reading ListSource URL: mems.sandia.govLanguage: English - Date: 2013-04-09 15:47:51
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13![ww ww ww ISSN[removed]Volume 21 Number 11 November 2011 ww ww ww ISSN[removed]Volume 21 Number 11 November 2011](https://www.pdfsearch.io/img/98623045f73f168a036728eb35d598c8.jpg) | Add to Reading ListSource URL: micro.seas.harvard.eduLanguage: English - Date: 2011-11-11 19:00:54
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14![SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory](https://www.pdfsearch.io/img/7852614fd1b07c20b3c4fe80f0f2c3b9.jpg) | Add to Reading ListSource URL: www.mems.sandia.govLanguage: English - Date: 2013-04-09 15:47:51
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15![SIMTech Technical Report (PT[removed]JT) Chemical Mechanical Planarization SIMTech Technical Report (PT[removed]JT) Chemical Mechanical Planarization](https://www.pdfsearch.io/img/a648b808c72d4a9447fda27bb753ce1b.jpg) | Add to Reading ListSource URL: maltiel-consulting.comLanguage: English - Date: 2013-04-20 18:07:00
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16![227 Introduction to Micro-Electro-Mechanical Systems (MEMS) 227 Introduction to Micro-Electro-Mechanical Systems (MEMS)](https://www.pdfsearch.io/img/3ed0b8bb49622832ec3502928c54bbba.jpg) | Add to Reading ListSource URL: www.nectec.or.thLanguage: English - Date: 2003-02-18 23:39:28
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17![An Introduction to MEMS (Micro-electromechanical Systems) An Introduction to MEMS (Micro-electromechanical Systems)](https://www.pdfsearch.io/img/b7bf5126f031c3112c4bbc20f33dbc5f.jpg) | Add to Reading ListSource URL: www.lboro.ac.ukLanguage: English - Date: 2012-11-01 04:16:41
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18![Surface Micromachining for Microelectromechanical Systems JAMES M. BUSTILLO, ROGER T. HOWE, FELLOW, IEEE, AND Surface Micromachining for Microelectromechanical Systems JAMES M. BUSTILLO, ROGER T. HOWE, FELLOW, IEEE, AND](https://www.pdfsearch.io/img/b66878fe65aa559fca3c40a50d8fef33.jpg) | Add to Reading ListSource URL: www.ee.nthu.edu.twLanguage: English - Date: 2004-02-25 03:13:04
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19![Microassembly Technologies for MEMS Michael B. Cohn¤‡, Karl F. Böhringer+º, J. Mark Noworolski¤‡, Angad Singh‡, Chris G. Keller§, Ken Y. Goldberg+, and Roger T. Howe¤*‡ Microassembly Technologies for MEMS Michael B. Cohn¤‡, Karl F. Böhringer+º, J. Mark Noworolski¤‡, Angad Singh‡, Chris G. Keller§, Ken Y. Goldberg+, and Roger T. Howe¤*‡](https://www.pdfsearch.io/img/fd56ee9eb22eb52819cd0d2c6a72399e.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2003-07-05 01:01:00
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20![](https://www.pdfsearch.io/img/695a592d23a3b880e21f93efaf80e7f1.jpg) | Add to Reading ListSource URL: microlab.berkeley.eduLanguage: English |
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