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Surface micromachining
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11	PDF Document Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2013-04-03 21:06:05 Chemistry Microelectromechanical systems Surface micromachining Microsystem Micromachinery Bulk micromachining Silicon on insulator Silicon Integrated circuit Microtechnology Materials science Technology
12	SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory Add to Reading List Source URL: mems.sandia.gov Language: English - Date: 2013-04-09 15:47:51 Statistics Technology Surface micromachining Standard deviation Microelectromechanical systems Etching Polycrystalline silicon Resist Chemical-mechanical planarization Materials science Microtechnology Semiconductor device fabrication
13	ww ww ww ISSN[removed]Volume 21 Number 11 November 2011 Add to Reading List Source URL: micro.seas.harvard.edu Language: English - Date: 2011-11-11 19:00:54 Electromagnetism Electronics manufacturing Electrical engineering Nanotechnology Electronic engineering Microelectromechanical systems Surface micromachining Microfabrication Adhesive Materials science Technology Microtechnology
14	SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory Add to Reading List Source URL: www.mems.sandia.gov Language: English - Date: 2013-04-09 15:47:51 Statistics Technology Surface micromachining Standard deviation Microelectromechanical systems Etching Polycrystalline silicon Resist Chemical-mechanical planarization Materials science Microtechnology Semiconductor device fabrication
15	SIMTech Technical Report (PT[removed]JT) Chemical Mechanical Planarization Add to Reading List Source URL: maltiel-consulting.com Language: English - Date: 2013-04-20 18:07:00 Technology Chemical-mechanical planarization Copper interconnect Microelectromechanical systems Etching Surface finishing Surface micromachining Shallow trench isolation Photolithography Semiconductor device fabrication Materials science Microtechnology
16	227 Introduction to Micro-Electro-Mechanical Systems (MEMS) Add to Reading List Source URL: www.nectec.or.th Language: English - Date: 2003-02-18 23:39:28 Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Deformable mirror Microfabrication Surface micromachining Micromachinery Bulk micromachining Beam steering Microlens Microtechnology Materials science Technology
17	An Introduction to MEMS (Micro-electromechanical Systems) Add to Reading List Source URL: www.lboro.ac.uk Language: English - Date: 2012-11-01 04:16:41 Micro-Opto-Electro-Mechanical Systems Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Microsystem Semiconductor Equipment and Materials International Bio-MEMS RF MEMS Microtechnology Materials science Technology
18	Surface Micromachining for Microelectromechanical Systems JAMES M. BUSTILLO, ROGER T. HOWE, FELLOW, IEEE, AND Add to Reading List Source URL: www.ee.nthu.edu.tw Language: English - Date: 2004-02-25 03:13:04 Semiconductor device fabrication Nanotechnology Microelectromechanical systems Surface micromachining Polycrystalline silicon Chemical vapor deposition Bulk micromachining Epitaxy Deep reactive-ion etching Materials science Microtechnology Technology
19	Microassembly Technologies for MEMS Michael B. Cohn¤‡, Karl F. Böhringer+º, J. Mark Noworolski¤‡, Angad Singh‡, Chris G. Keller§, Ken Y. Goldberg+, and Roger T. Howe¤‡ Add to Reading List Source URL: www.ee.washington.edu Language: English* - Date: 2003-07-05 01:01:00 Technology Microelectromechanical systems Surface micromachining Microfabrication Micro-Opto-Electro-Mechanical Systems Flip chip Integrated circuit Etching Three-dimensional integrated circuit Materials science Microtechnology Semiconductor device fabrication
20	PDF Document Add to Reading List Source URL: microlab.berkeley.edu Language: English Microtechnology Technology Plasma processing Nanotechnology Thin film deposition Microelectromechanical systems Etching Chemical vapor deposition Surface micromachining Materials science Chemistry Semiconductor device fabrication